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Diffusion Barrier Stack - 5 nm -3 nm -2 nm :...-...: . . O. 21-lm Figure 2: Schematic representing a cross-sectional view of the topography that is encountered in the processing of integrated circuits. (Not to scale) these sub-micron sized features is depicted in Fig. 2. The role of the diffusion barrier is to prevent the diffusion of metallic ions into the interlayer dielectric (lLD). Depending on the technology, in particular the choice of the ILD and the metal interconnect, the diffusion barrier may be Ti, Ta, TiN, TaN, or a multi-layered structure of these materials. The adhesion of the barrier to the dielectric, the conformality of the barrier to the feature, the physical structure of the film, and the chemical composition of the film are key issues that are determined in part by the nature of the deposition process. Likewise, after the growth of the barrier, a conducting layer (the seed layer) is needed for subsequent filling of the trench by electrochemical deposition. Again, the growth process must be able to deposit a film that is continuous along the topography of the sub-micron sized features. Other factors of concern are the purity and the texture of the seed layer, as both of these factors influence the final resistivity of the metallic interconnect. Sputter-deposited coatings are also commonly employed for their electro-optical properties. For example, an electrochromic glazing is used to control the flux of light that is transmitted through a glazed material.

What is the origin of the Others and their eerie beach? How are liveships and dragons connected? But Fitz and his followers are not the only ones with a deadly grudge against the Four. An ancient wrong will bring them unlikely and dangerous allies in their quest. And if the corrupt society of Pulsed and Pulsed Bias Sputtering : Principles and Applications ebook pdf Clerres is to be brought down, Fitz and the Fool will have to make a series of profound and fateful sacrifices. ASSASSIN'S FATE is a magnificent tour de force and with it Robin Hobb demonstrates yet again that she is the reigning queen of epic fantasy. But the past comes back to haunt Jacob when he finds himself on the receiving end of treachery and the victim of a cruel bait and switch. The man who wanted only one woman will end up with sisters who have never gotten along and now must spend the rest of their lives sharing a husband. In the power struggles that follow, only one woman will triumph . . . or will she?

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Author: Edward V. Barnat,Toh-Ming Lu
Number of Pages: 157 pages
Published Date: 23 Feb 2014
Publisher: Springer-Verlag New York Inc.
Publication Country: New York, NY, United States
Language: English
ISBN: 9781461350637
Download Link: Click Here
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